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R400 Stage Parts

Fine Motion Assy
Plain Rod Drive

 

     

 

Complete Drive Assy
(Plain Rod Drive)

SA-400

 

(No Image)
 

 

Drive shaft
(Plain Rod Drive)

Part No. RH400-174

 

 

Handwheel spinner

Part No. 52-364

 

Fine motion
handwheel

Part No. 52-430

 

Drive bearing (x3)

Part No. 356-26

 

Shoulder screw (x3)

Part No. 356-30

 

Leadscrew support
bush (x2)

Part No. RH400-187

 

Drive block

Part No. 356-09

 

Rail Guides

 

X Axis Rails & Rollers
(300mm Travel)


Part No. RH400-097-1

 

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Z Axis Rails & Rollers
(150mm Travel)


Part No. RH400-099

 

(No Image)
 

 

Top Stage

 

Top stage

Part No. RH400-015-1

 

(No Image)
 

 

 

Z Axis Drive

Focus

 

Focus Leadscrew

RH400-047

 

(No Image)
 

 

Focus Drive Nut

RH400-048

 

(No Image)
 

 

 

X Axis Scale

 

Scale 12" X axis
.05 micron

Part No. Scale-12-5

 

 
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