R400 Stage Parts

Fine Motion Assy
Plain Rod Drive

Complete Drive Assy
(Plain Rod Drive)

SA-400

Drive shaft
(Plain Rod Drive)

Part No. RH400-174

Handwheel spinner

Part No. 52-364

Fine motion
handwheel

Part No. 52-430

Drive bearing (x3)

Part No. 356-26

Shoulder screw (x3)

Part No. 356-30

Leadscrew support
bush (x2)

Part No. RH400-187

Drive block

Part No. 356-09

Rail Guides

X Axis Rails & Rollers
(300mm Travel)

Part No. RH400-097-1

Z Axis Rails & Rollers
(150mm Travel)

Part No. RH400-099

Top Stage

Top stage

Part No. RH400-015-1

Z Axis Drive

Focus

Focus Leadscrew

RH400-047

Focus Drive Nut

RH400-048

X Axis Scale

Scale 12" X axis
.05 micron

Part No. Scale-12-5